The photoelectric conversion industry chain formed by the application and development of silicon materials is called "photovoltaic new energy industry", including the production of high-purity poly-silicon raw materials, solar cell production, solar cell module production, and related production equipment manufacturing . In the manufacturing process of these related equipment, dirt will inevitably be generated, which will affect the service life and efficacy of the parts. The emergence of ultrasonic cleaning has solved this fundamental problem and greatly promoted the development of the new energy/photovoltaic industry .