Vacuum Low Pressure Plasma Cleaning Machine

Vacuum low-pressure plasma cleaning machines are engineered for superior surface treatment in both pre-production process verification and mass production. It delivers outstanding performance in cleaning, activation, and coating applications. To meet diverse industrial requirements, we offer models in various sizes and additional options — from small benthctop units for small-batch production to large-chamber systems capable of handling complex components in the semiconductor and automotive industries.

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Product Features

01

PLC+human-machine interface control, simple operation
02

Supports authority classification and independent password lock, with multiple interlocking functions to ensure the safety of equipment use
03

It can switch between manual mode and automatic mode
04

High vacuum chamber design and manufacturing process with excellent sealing
05

Over-temperature, overload, short circuit, and other abnormal prompts and alarm functions
06

Unique discharge technology, plasma formation is uniform and stable, ensuring better treatment effect
07

Ultra-low temperature treatment, no damage to the substrate, compatible with various materials
08

Layered design of vacuum chamber, flexible adjustment according to the size of the processed product
09

Equipped with Foma casters, which are height-adjustable and dust-proof

Technical Parameter

Model	Capacity (L)	Machine Dimension (mm)	Chamber Dimension (mm)	Plasma Power (W)	Pallet Size (mm)	Number of Layers	Gas Channel	Gas Pressure	Pumping Speed	Control Mode
JMD-ZKG-05D	5	415600450	Φ150*260	200	145*255	1 layer	2 ways	0.1-0.2MPa	4m3/h	PLC+7" touch screen
JMD-ZKG-08D	8	415600450	180260160	200	160*240	1 layer	2 ways	0.1-0.2MPa	4m3/h	PLC+7" touch screen
JMD-ZKG-20D	20	6508001750	260260300	500	225*255	2-4 layer	2-4 ways	0.1-0.2MPa	16m3/h	PLC+10" touch screen
JMD-ZKG-35D	35	6508001750	300300400	500	265*355	2-4 layer	2-4 ways	0.1-0.2MPa	16m3/h	PLC+10" touch screen
JMD-ZKG-60D	60	7508001750	400400400	1000	365*355	3-6 layer	2-4 ways	0.1-0.2MPa	30m3/h	PLC+10" touch screen
JMD-ZKG-100D	100	7508001750	400500500	1500	365*455	3-7 layer	2-4 ways	0.1-0.2MPa	30m3/h	PLC+10" touch screen
JMD-ZKG-300D	300	150013001750	700600800	5KW / 10KW	665*750	6-10 layer	2-4 ways	0.1-0.2MPa	60+280m3/h	PLC+14" touch screen

Cleaning Effect

Plasma cleaning systems play a key role in the cleaning process of optical devices and electronic components, effectively removing surface impurities and providing a clean, high-quality substrate for subsequent coating, printing, bonding, and spraying processes.

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