Vacuum Low Pressure Plasma Cleaning Machine

Vacuum low-pressure plasma cleaning machines are engineered for superior surface treatment in both pre-production process verification and mass production. It delivers outstanding performance in cleaning, activation, and coating applications. To meet diverse industrial requirements, we offer models in various sizes and additional options — from small benthctop units for small-batch production to large-chamber systems capable of handling complex components in the semiconductor and automotive industries.

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Product Features

01

Self-developed human-machine interface and control system, comprehensive functions, simple to operate
02

Supports authority classification and independent password lock, with multiple interlocking functions to ensure the safety of equipment use. It can switch between manual mode and automatic mode
03

High vacuum chamber design with excellent sealing, makes the process gas more uniform, and the ultimate vacuum can reach below 5Pa
04

Over-temperature, overload, short circuit, and other abnormal prompts and alarm functions. The process gas pipe is not exposed to eliminate potential safety hazards
05

Unique discharge technology, plasma formation is uniform and stable, ensuring better effect
06

Ultra-low temperature treatment, no damage to the substrate, compatible with various materials
07

Layered design of vacuum chamber, flexible adjustment according to the size of the processed product
08

High-performance electrical components to ensure stable and reliable equipment quality. We can also customize key components according to your specific brand needs
09

Ergonomic design makes operation easy and comfortable. Innovative hinge design extends the service life of the seal. Equipped with casters, which are height-adjustable and dust-proof

Technical Parameter

Model	Capacity (L)	Machine Dimension (mm)	Chamber Dimension (mm)	Plasma Power (W)	Frequency	Number of Layers	Gas Channel	Gas Pressure	Flow meter	Pumping Speed	Vacuum Pump
JMD-ZKG-05D	5	415600450	Φ150*260	200	40kHz/ 13.56MHz	1 layer	2 ways	0.1-0.2MPa	2 float flowmeters	4m3/h	Oil pump/ dry pump
JMD-ZKG-08D	8	415600450	180260160	200	40kHz/ 13.56MHz	1 layer	2 ways	0.1-0.2MPa	2 float flowmeters	4m3/h	Oil pump/ dry pump
JMD-ZKG-20D	20	6508001750	260260300	500	40kHz/ 13.56MHz	2-4 layer	2-4 ways	0.1-0.2MPa	2-4pcs MFC	16m3/h	Oil pump/ dry pump
JMD-ZKG-35D	35	6508001750	300300400	500	40kHz/ 13.56MHz	2-4 layer	2-4 ways	0.1-0.2MPa	2-4pcs MFC	16m3/h	Oil pump/ dry pump
JMD-ZKG-60D	60	7508001750	400400400	1000	40kHz/ 13.56MHz	3-6 layer	2-4 ways	0.1-0.2MPa	2-4pcs MFC	30m3/h	Oil pump/ dry pump
JMD-ZKG-100D	100	7508001750	400500500	1500	40kHz/ 13.56MHz	3-7 layer	2-4 ways	0.1-0.2MPa	2-4pcs MFC	30m3/h	Oil pump/ dry pump
JMD-ZKG-300D	300	150013001750	700600800	5KW / 10KW	40kHz/ 13.56MHz	6-10 layer	2-4 ways	0.1-0.2MPa	2-4pcs MFC	60+280m3/h	Oil pump/ dry pump

Cleaning Effect

Plasma cleaning systems play a key role in the cleaning process of optical devices and electronic components, effectively removing surface impurities and providing a clean, high-quality substrate for subsequent coating, printing, bonding, and spraying processes.

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