Large Vacuum Low Pressure Plasma Cleaning Machine

Vacuum low-pressure plasma cleaning machines are engineered for superior surface treatment in both pre-production process verification and mass production. It delivers outstanding performance in cleaning, activation, and coating applications. Notably, our systems are ideal for the surface activation of hard-to-bond materials like PTFE, FEP, PEEK, and Silicones. To meet diverse industrial requirements, we offer models in various sizes and additional options — from small benchtop units for small-batch production to large-chamber systems capable of handling complex components in the semiconductor and automotive industries.

Product Features
  • 01
    Self-developed human-machine interface and control system, comprehensive functions, simple to operate
  • 02
    Supports authority classification and independent password lock, with multiple interlocking functions to ensure the safety of equipment use. It can switch between manual mode and automatic mode
  • 03
    High vacuum chamber design with excellent sealing, makes the process gas more uniform, and the ultimate vacuum can reach below 5Pa
  • 04
    Over-temperature, overload, short circuit, and other abnormal prompts and alarm functions. The process gas pipe is not exposed to eliminate potential safety hazards
  • 05
    Unique discharge technology, plasma formation is uniform and stable, ensuring better effect
  • 06
    Ultra-low temperature treatment, no damage to the substrate, compatible with various materials
  • 07
    Layered design of vacuum chamber, flexible adjustment according to the size of the processed product
  • 08
    High-performance electrical components to ensure stable and reliable equipment quality. We can also customize key components according to your specific needs
  • 09
    Ergonomic design makes operation easy and comfortable. Innovative hinge design extends the service life of the seal. Equipped with casters, which are height-adjustable and dust-proof
Technical Parameter
Model Capacity (L) Chamber Dimension (mm) Pallet Size (mm) Power (W) Frequency Gas Channel Gas Pressure Control Mode Vacuum Pump
JMD-20K Pro 20 260×260×300 225×255 500 40kHz 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-20M Pro 20 260×260×300 225×255 300 13.56 MHz, Automatic Tuning Network 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-35K Pro 35 300×300×400 265×355 500 40kHz 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-35M Pro 35 300×300×400 265×355 300 13.56 MHz, Automatic Tuning Network 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-60K Pro 60 400×400×400 365×355 1000 40kHz 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-60M Pro 60 400×400×400 365×355 500 13.56 MHz, Automatic Tuning Network 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-100K Pro 100 400×500×500 365×455 1500 40kHz 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)
JMD-100M Pro 100 400×500×500 365×455 500/1000 13.56 MHz, Automatic Tuning Network 2-4 Ways 0.1-0.2 MPa PLC+HMI Oil Pump with Oil Mist Filter (Optional Upgrade with Dry Pump)

Related videos
The surface tension of the glass increases after plasma treatment, transforming the glass from hydrophobic to ultra-hydrophilic for flawless bonding and coating adhesion.
Cleaning Effect
Plasma cleaning systems play a key role in the cleaning process of optical devices and electronic components, effectively removing surface impurities and providing a clean, high-quality substrate for subsequent coating, printing, bonding, and spraying processes.

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